发明名称
摘要 PURPOSE:To make it possible to completely seal a box filled with clean air by a method wherein a bottom lid is sealingly pressed by expanding a rubber tube. CONSTITUTION:This box comprises a container top lid 2 for storage and a bottom lid 4 fixedly pressed around the circumference of the lower opening 3 of the lid 2. An air chamber 14 is provided in a recess form in the bottom surface of an air-supply filter 11. In the bottom lid 4 is provided a recess groove 18 around the position facing an annular recess portion 6 around the wall of a disk 10. A rubber tube 19 is wound around the recess groove and air is supplied to the rubber tube 19 to expand it, causing the outer circumferential surface of the rubber tube 19 to be sealingly pressed against the annular recess portion 9 of a bottom lid fixing ring 9. A locking means 7 for locking to a locking section 8 is provided. As a result of this, neither a clean air is leaked nor contaminated air is allowed to flow in.
申请公布号 JPH03786(B2) 申请公布日期 1991.01.08
申请号 JP19880123264 申请日期 1988.05.20
申请人 KONDO KOGYO KK 发明人 ISHII TSUTOMU
分类号 H01L21/673;H01L21/68 主分类号 H01L21/673
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