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发明名称
ULTRASONIC CLEANING DEVICE
摘要
申请公布号
JPH0368482(A)
申请公布日期
1991.03.25
申请号
JP19890206212
申请日期
1989.08.08
申请人
NEC YAMAGUCHI LTD
发明人
NAKAO YASUKI
分类号
B08B3/12;H01L21/304
主分类号
B08B3/12
代理机构
代理人
主权项
地址
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