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发明名称
VACUUM TREATMENT DEVICE
摘要
申请公布号
JPH0377638(A)
申请公布日期
1991.04.03
申请号
JP19890213261
申请日期
1989.08.19
申请人
FUJITSU LTD
发明人
UEDA YOSHITO;YOKIASHI HIROMICHI
分类号
B01J3/02;B01J3/00;C23C14/22;C23C14/24;H01J37/317;H01L21/265
主分类号
B01J3/02
代理机构
代理人
主权项
地址
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