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发明名称
SILICON SEMICONDUCTOR SINGLE CRYSTAL
摘要
申请公布号
JPH0380193(A)
申请公布日期
1991.04.04
申请号
JP19890216569
申请日期
1989.08.23
申请人
SHIN ETSU HANDOTAI CO LTD
发明人
YOKOTA SHUJI;YAMAGISHI HIROTOSHI
分类号
C30B15/00;C30B29/06;H01L21/322
主分类号
C30B15/00
代理机构
代理人
主权项
地址
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