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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0399438(A)
申请公布日期
1991.04.24
申请号
JP19890236101
申请日期
1989.09.12
申请人
SEIKO INSTR INC
发明人
AIDA MASANORI
分类号
H01L23/52;H01L21/28;H01L21/3205
主分类号
H01L23/52
代理机构
代理人
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地址
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