| 摘要 |
The deionized water purification of this invention is a small compact unit which is inserted between the purified deionized water distribution line in a plant water purification system and the inlet of a point of use apparatus. The small compact modular point of use deionized water purification unit reduces the total organic contaminant loading, the particulate loading, and the ionic contaminants in the purified deionized water from the plant purification system. The purification unit of this invention also includes means for sterilization of the point of use deionized water purification unit and a new technique for preventing damage to the ozone generator used in the sterilization process.
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