发明名称 System for, and method of, regulating the wavelength of a light beam
摘要 A laser light beam is processed in a first optical path to produce light indications in a plurality of free spectral paths. These light indications are introduced through slits to produce signals at spaced positions at the opposite peripheries of a linear detector array. The distances between correlated pairs of energized detectors at the opposite peripheries of the array indicate the relative value of the laser wavelength in the free spectral ranges. The laser light beam is also processed in a second optical path, simultaneously with the processing of the laser light beam in the first optical path, to produce light in a single path. The second optical path is dependent upon the wavelength of the laser light beam. The light produced in the second optical path may be introduced through another slit to energize centrally disposed detectors in the array. The particular detectors energized are dependent upon the wavelength of the laser light. The detectors in the linear array may be scanned to produce signals related in time to the disposition of the detectors energized in the array. A data processing system processes these signals and produces a signal to adjust the wavelength of the laser beam to a particular value. When the laser is pulsed, the system described above may operate in real time after each pulse to adjust the laser before the next pulse to produce light at the particular wavelength.
申请公布号 US5025445(A) 申请公布日期 1991.06.18
申请号 US19890440605 申请日期 1989.11.22
申请人 CYMER LASER TECHNOLOGIES 发明人 ANDERSON, STUART L.;SANDSTROM, RICHARD L.
分类号 H01S3/13 主分类号 H01S3/13
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