| 摘要 |
PURPOSE:To obtain high accurate laser trimming apparatus by beforehand executing laser beam blowing into pattern for checking allignment, deciding whether this is in the range of permissible accuracy or not and executing the prescribed laser beam blowing after setting the allignment in the range of permissible accuracy. CONSTITUTION:Chip allignment is executed and laser beam generator 2 is driven, and the laser beam L is irradiated in the pattern for checking the allignment formed to the allignment part 3 in IC chip to execute the laser beam blowing for checking. Successively, picture recognizing part 4 is used and the formed laser beam blowing part and the pattern for checking are detected and stored into a picture memory in an arithmetic part 5. The arithmetic part 5 operates an allignment error. The allignment error is compared with the permissible accurate range with a micro computer 1 and in the case of being in the range of permissible accuracy, the necessary laser beam blowing is executed to form the desired IC chip pattern. In the case of being out of the range of the permissible accuracy corrected allignment is executed and the desired laser beam blowing step is executed to the allignment 3. |
