| 摘要 |
<p>PURPOSE:To use a high polymer plate as an insulating substrate which enables film formation at a lower temperature by using a hard carbonaceous film for an insulating film as an active element. CONSTITUTION:The insulating film of the MIM element consists of the hard carbonaceous film (called i-Ci film, diamond carbonaceous film, or amorphous diamond thin film) which contains carbon atoms and hydrogen atoms as main structure forming elements and also contains at least either of amorphous crystal and fine crystal. This hard carbonaceous film can be formed at the low temperature, so a high polymer material is used for the insulating film to obtain the low cost liquid crystal panel which is thin and light in weight and has shock resistance. Further, polyester, polysulfone, polyamide, polyimide, polycarbonate, poylyacetate, etc., are used effectively as the material of the high polymer substrate (insulating substrate).</p> |
