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发明名称	EXPOSURE
摘要
申请公布号	JPH03196512(A)	申请公布日期	1991.08.28
申请号	JP19900288367	申请日期	1990.10.29
申请人	CANON INC	发明人	SUZUKI AKIYOSHI
分类号	G03F7/20;H01L21/027;H01L21/30	主分类号	G03F7/20
代理机构		代理人
主权项
地址

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