发明名称 AN ADJUSTING DEVICE FOR MICROSCOPIC MOVEMENTS
摘要 The description relates to an adjusting device 1 for microscopic movements and comprising a carrier element 3 with, fixed on the carrier element 3, drive elements 6a, 6b, 6c which have a piezoelectric transducer which utilises the shear effect and which have a bearing element 5 which rests on the drive elements 6a, b, c. So that such an adjusting device 1, regardless of its position, is able to carry out high-precision reproducible microscopic movements, in particular also movements in a vertical direction being possible while under load, the form and disposition of drive element 6 and bearing element 5 are designed for the performance of a guided microscopic movement. In addition, a pressure applying device 8 is provided which presses the bearing element 5 and the drive element 6 against one another with a predetermined force. Preferably, the pressure applying device comprises at least one magnet 17 which attracts the bearing element 5 with an adjustable force. According to particular embodiments, guided rotary movements are also feasible with the adjusting device according to the invention.
申请公布号 GB9115703(D0) 申请公布日期 1991.09.04
申请号 GB19910015703 申请日期 1991.07.20
申请人 OMICRON VAKUUMPHYSIK GMBH 发明人
分类号 G12B5/00;H01J37/20;H01L21/68;H01L41/09;H02N2/00;H02N2/12 主分类号 G12B5/00
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