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发明名称
SEMICONDUCTOR MANUFACTURING APPARATUS
摘要
申请公布号
JPH03209718(A)
申请公布日期
1991.09.12
申请号
JP19900004748
申请日期
1990.01.11
申请人
MITSUBISHI ELECTRIC CORP
发明人
OKAMOTO YOSHIHIKO;MURAKISHI TAKEO
分类号
H01L21/205;H01L21/31
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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