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发明名称
Verfahren zum AEtzen eines einen pn-UEbergang enthaltenden Siliziumkoerpers einer Halbleiteranordnung
摘要
申请公布号
DE1248425(B)
申请公布日期
1967.08.24
申请号
DE1964L047966
申请日期
1964.06.04
申请人
LICENTIA PATENT-VERWALTUNGS-G.M.B.H.
发明人
MAGNER RICHARD
分类号
C23F1/24;H01L21/00
主分类号
C23F1/24
代理机构
代理人
主权项
地址
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