发明名称 |
Method for evaluating a lithium niobate thin film and apparatus for preparing the same. |
摘要 |
<p>A method for evaluating a lithium niobate thin film includes measuring an absorption edge wavelength of a lithium niobate thin film and evaluating a lithium-to-niobium composition ratio of the thin film, and an apparatus for preparing a thin film including a thin film-forming body capable of controlling the lithium-to-niobium composition ratio of a lithium niobate thin film being formed and an evaluation device for evaluating the lithium-to-niobium composition ratio, the evaluation device being provided with a monitor substrate, an optical path for spectrometry, an ultraviolet ray source and a measurement part for measuring an absorption edge wavelength of the thin film. <IMAGE></p> |
申请公布号 |
EP0454499(A2) |
申请公布日期 |
1991.10.30 |
申请号 |
EP19910303850 |
申请日期 |
1991.04.29 |
申请人 |
SHARP KABUSHIKI KAISHA |
发明人 |
MATSUNAGA, HIRONORI;OHNO, HIROTAKA, NISHIYAMOTO;OKAMOTO, YASUNARI |
分类号 |
G01N21/84;G01N21/31;C30B29/30;G01N21/21;G01N21/33;G02B6/13 |
主分类号 |
G01N21/84 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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