Method for manufacturing functional thin film.

摘要

A method for manufacturing a functional thin film by a vacuum evaporation method is referred to.During evaporation-depositing a thin film containing a material (6) on a substrate (1), a gas flow (from nozzle 8) controls the orientation of the material (6) in a manner that the gas flow substantially intersects the direction of the flow of vapor of said material (6) onto said substrate (6). <IMAGE>