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发明名称
DIFFUSION BOAT FOR SEMICONDUCTOR
摘要
申请公布号
JPH0410530(A)
申请公布日期
1992.01.14
申请号
JP19900110098
申请日期
1990.04.27
申请人
TOSHIBA CERAMICS CO LTD
发明人
NISHIMOTO YASUSHI;MASUDA NORIO
分类号
H01L21/22
主分类号
H01L21/22
代理机构
代理人
主权项
地址
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