发明名称 MANUFACTURE OF SURFACE CONDUCTION TYPE ELECTRON EMITTING ELEMENT
摘要 <p>PURPOSE:To correct a short-circuit defect to be generated in a manufacturing process easily and securely by performing electrical feeding process between electrodes opposite to each other, and disconnecting a part of short-circuit for formation. CONSTITUTION:After forming electrodes 2, 2, opposite to each other on a substrate 1, electron emission materials are formed between the opposite electrodes 2, 2'. Voltage is applied between both the electrodes 2, 2' of an element to disconnect a defect part 4, and thereafter, an electron emission material is formed to obtain an electron emission part 3. At the time of correcting a short- circuit defect to be generated in a manufacturing process, a method for disconnecting a short-circuit defect with the heat to be generated by electrical feeding is used. Fine position control is thereby eliminated, and repair is enabled by performing electrical feeding control easily, and correction reproductionability of a short-circuit part is improved to enable the accurate repair.</p>
申请公布号 JPH0410325(A) 申请公布日期 1992.01.14
申请号 JP19900110198 申请日期 1990.04.27
申请人 CANON INC 发明人 SAKANO YOSHIKAZU;KANEKO TETSUYA;TAKEDA TOSHIHIKO;MISHINA SHINYA;NOMURA ICHIRO
分类号 H01J9/02;H01J1/316;H01J9/50 主分类号 H01J9/02
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