MICROWAVE PLASMA GENERATING APPARATUS AND PROCESS FOR PREPARING DIAMOND LAYER BY UTILIZING SAME

摘要

The present invention relates to a microwave plasma generating apparatus for generating plasma by radiating microwave pulses into a discharging space so adapted as to generate plasma of a large region in a given position, which is characterized by a plurality of microwave radiation means for continuously radiating microwave pulses by staggering the timing of radiation of the microwave pulses, and to a process for the preparation of a diamond layer, which is characterized by synthesizing. the diamond layer by taking advantage of the microwave plasma generating apparatus in order to efficiently form the diamond layer with a uniform film thickness on the substrate member of a wide area. The present invention provides a useful microwave plasma generating apparatus and method for the preparation of the diamond layer. 3 9