| 摘要 |
PURPOSE:To obtain an optical waveguide with low bend loss at a curvature part and low connection loss with an optical fiber by forming a high refractive index layer on a substrate in a form sandwiching a low refractive index layer, and forming a waveguide bent by the low refractive index layer at the high refractive index and low refractive index layers. CONSTITUTION:After the high refractive index layer 12 is formed on the substrate 11, part of the high refractive index layer 12 is eliminated, and the low refractive index layer 13 with refractive index less than that of the high refractive index layer 12 is formed at that part. Thence, a groove 14 bent by the low refractive index layer 13 is formed at the high refractive index layer 12 and the low refractive index layer 13, and a core material 15 with refractive index higher than that of the high refractive index layer 12 is packaged in the groove 14. Therefore, the curvature part of the optical waveguide 15 is located on the low refractive index layer 13, and the terminal part of the optical waveguide 15 is located on the high refractive index layer 12, therefore, specific refractive index difference between the core and a clad at the curvature part is comparatively large, and the specific refractive index difference between the core and the clad at the terminal part of the optical waveguide is comparatively small. Thereby, the optical waveguide can be obtained in which the bend loss at the curvature part can be reduced, and also, the connection loss with the optical fiber can be reduced. |
