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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH04150025(A)
申请公布日期
1992.05.22
申请号
JP19900275531
申请日期
1990.10.15
申请人
FUJITSU LTD
发明人
YAGISHITA YUICHIRO
分类号
H01L21/302;H01L21/3065
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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