| 摘要 |
PURPOSE:To manufacture the title amorphous alloy semiconductor thin film in an arbitrary blending ratio without deteriorating the film quality in order to use the amorphous alloy for increasing the photo-efficiency of a photoelectromotive element. CONSTITUTION:The title amorphous alloy semiconductor thin film manufacturing device is provided with the gas valves 12, 14 to instantaneously open and close at least exceeding one material gas leading in parts out of two of them 11, 13 to a vacuum vessel 1 as well as a power supply part 8 to feed the respective leading-in parts 11, 13 with the discharge power required for decomposing respective material gas, furthermore, the opening and closing of respective leading-in parts 11, 13 and the impression of power supply are synchronized. |
