| 摘要 |
PURPOSE: To realize a high output beam generator, especially for a UV or VUV beam with superior efficiency which can be manufactured at low cost, in which a large-scaled cubic beam generator can be constituted, a UV beam can be concentrated on an angle of radiation which can be selected in a wide limit as desired, and an inside electrode can no longer generate and project a shadow (shadow part). CONSTITUTION: In a UV high output beam generator, an outside electrode 4 is arranged at only one part of the surrounding of an outside dielectric tube 1, so that a generated beam can be directed to a certain prescribed direction, or that a shadow action by an inside dielectric tube 2 can be escaped. Thus, an object or material to be irradiated can be arranged directly in a discharging area 7. |
