| 摘要 |
PURPOSE:To narrow a gap in the carrying passage of a substrate carrier. CONSTITUTION:A conveyor rail 8, by which a substrate is carried along a guide rail 9, and a revolving conveyor 12 are installed face to face. A plate 17 is pivoted to the tip part of the conveyor rail 8 in a rotatable manner, while guide members 22, 23, which guide the substrate in the carrying direction, are installed on the plate 17. When the substrate is carried, a cylinder mechanism 18, which is connected to the plate 17, is extended tortotate the plate 17, so that the guide members 22, 23 are moved/inserted into a gap between the coonveyor rail 8 and the revolving conveyor 12, thereby narrowing the gap. When the revoloving conveyor 12 is revolving, the cylinder mechanism 18 is contracted, the guide members 22, 23 are rotated above the conveyor rail 8 together with the plate 17 so that these members do not interfere with the revolving conveyor 12. |
