| 摘要 |
<p>PURPOSE:To carry a semi-conductor device between machines or pallets with arbitrary partition intervals. CONSTITUTION:In taking a semiconductor device in/from a pallet with small partition intervals, the intervals of plural attractive pads 1 are made small, and in taking the semiconductor device in/from a pallet 4 with large partition intervals, the intervals of the plural attractive pads 1 are made larger. Since the intervals of the attractive pads 1 can be set arbitrarily according to partition intervals of the pallets 3, 4 or the like to be carried, it is possible to use this device for carrying work between pallets or machines with arbitrary partition intervals.</p> |
