| 摘要 |
<p>PURPOSE:To adjust a gap at a high speed with good accuracy, by providing two or more dividing grooves to a lip part structure in the lateral direction thereof and supplying air to one of bellows before supplying air to the other bellows through the hole in a drive part structure. CONSTITUTION:Upper and lower bellows 2a, 2b communicate with each other through the center holes 15b in the bellows, and the longitudinal and lateral holes 15c, 15d provided to a drive part structure 3. The drive part structure 3 is divided into many structures 3a, 3b, 3c...3n and a lip part structure 12 has dividing grooves between the adjacent structures. When compressed air is supplied to the bellows 2 from an air supply part 10, the force in the direction shown by an arrow X1 is generated between a main body structure 1 and the drive part structure 3, because the mechanical rigidity of the belows 2 in the axial direction thereof is lower than that of the other structure. Whereupon, elastic deformation is generated at the part of an elastic deforming part 11 and a lip part 13 moves in an X2-direction. This displacement quantity is almost proportional to the moment transmitted from the bellows 2a, 2b or the pressure of the compressed gas. Therefore, the opening degrees of the lip part at a large number of points can be controlled simultaneously and independently.</p> |
