摘要 |
PURPOSE:To detect the accelerations in three-axis directions and the angular velocities in two-axis directions. CONSTITUTION:A rotor 101, position sensors 103a to 103h for detecting its position, and a position detecting means for detecting the positions in mutually perpendicular three-axis directions of the rotor 101 and the position around two-axes of the rotor 101 from their outputs are provided. Further, cross feedback means 111a, 111b for cross-feedbacking respective detected outputs around two axes each other, amplifiers 112a to 112h for combining the outputs in three- axis from the position detecting means and the outputs around two axes through the cross-feedbacking means respectively and for outputting the combination of the outputs to the electromagnet coils 113a to 113h of a magnetic bearing, and adder/subtractors 105a to 105e for computing the positions in the three-axis directions and around the two aces of the rotor 101 from the combination of the outputs of the amplifiers 112a to 112h are provided. The accelerations of the directions are detected by differentiating the outputs of the position detecting means or the outputs in the three-axis directions of the adder/subtractors twice respectively, and the angular velocities around axes are detected by differentiating the outputs around two axes once respectively. |