| 摘要 |
PURPOSE:To improve detection precision and contrive the enlargement of a detection range, low price and the improvement of productivity in regard to the constitution of the sensor. CONSTITUTION:A beam 11 fixed at one end thereof and deflected by applied acceleration, a dead weight 13 attached to the other end of the beam 11, a reflecting mirror 14 attached to the dead weight 13, an emission element 15 emitting an irradiation light 19 toward the reflecting mirror 14 and a light receiving element 16 for detecting the intensity of a reflection light 20 of an irradiation light 19 reflected by the use of the reflecting mirror 14 are equipped for the acceleration sensor. The sensor is made constitution for opposing the emission element 15 and the light element 16 to said reflecting mirror 14 through an optical fiber 17. One end of the optical fiber 17 is attached to the dead weight 13, one hand of the emission element 15 and the light receiving element 16 is opposed to the other end of the optical fiber 17, the other hand of the emission element 15 and the light receiving element 16 is opposed to one end of the optical fiber 17 and the sensor is made the constitution without any need of the reflecting mirror. Furthermore a support member for fixing the beam 11 and fixed at one end of the beam 11 and the dead weight 13 attached to the other end of the beam 11 are made the constitution integrally formed by micro-machining of a single crystal board. |
