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经营范围
发明名称
FLATTENING METHOD OF INTERLAYER INSULATING FILM
摘要
申请公布号
JPH0529284(A)
申请公布日期
1993.02.05
申请号
JP19910180650
申请日期
1991.07.22
申请人
NEC CORP
发明人
NAMITA HIROMITSU
分类号
H01L21/302;H01L21/268;H01L21/3065
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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