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发明名称
SURFACE ROUGHNESS MEASURING METHOD
摘要
申请公布号
JPH0545145(A)
申请公布日期
1993.02.23
申请号
JP19910206670
申请日期
1991.08.19
申请人
FUJITSU LTD
发明人
YOSHIOKA ISAO
分类号
G01B11/30;H01L21/02;H01L21/66
主分类号
G01B11/30
代理机构
代理人
主权项
地址
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