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发明名称
CRYOPUMP EQUIPPED WITH LOW TEMPERATURE TRAP
摘要
申请公布号
JPH0544642(A)
申请公布日期
1993.02.23
申请号
JP19910202903
申请日期
1991.08.13
申请人
ULVAC KURAIO KK
发明人
MORIMOTO HIDETOSHI
分类号
F04B37/08
主分类号
F04B37/08
代理机构
代理人
主权项
地址
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