| 摘要 |
PURPOSE:To deflect one light deflecting part around two axes. CONSTITUTION:A reflection plate 28 and an inner frame 25, which are so provided that centroid positions of revolving shafts coincide with each other, are supported by flexible beams 26 and 27 and flexible beams 23 and 24, and the reflection plate 28 or the inner frame 25 receives the electrostatic force and is rotated with the flexible beam 23 or 24 or the flexible beam 26 or 27 as the center when a voltage is applied to one of fixed electrodes 31 and 32 or one of fixed electrodes 33 and 34 which are provided under them.
|
