STOICHIOMETRIC B1-TYPE TANTALUM NITRIDE AND A SINTERED BODY THEREOF AND METHOD OF SYNTHESIZING THE B1-TYPE TANTALUM NITRIDE

摘要

The object of the present invention is to provide a stoichiometric B1-type tantalum nitride and a sintered body thereof. A B1-type tantalum nitride and a sintered body thereof, wherein a stoichiometric B1-type tantalum nitride is produced typically according to the method of impact compression, having the properties (a) that the X-ray diffraction substantially shows a pattern ascribed to the stoichiometric B1-type tantalum nitride alone but not others, (b) that the measured value of the lattice spacing D (h, k, l) has a deviation of 0.00013 nm or less from the corresponding value calculated based on the B1 structure, (c) that the lattice constant is 0.4335 DIFFERENCE 0.4338 nm, (d) that the electron diffraction image substantially shows the spots particular to the stoichiometric B1-type tantalum nitride alone but not others and (e) the value of Z in TaNz is within a range of 0.96-1.01.