发明名称 |
Method of manufacturing substrate having semiconductor on insulator. |
摘要 |
<p>A polysilicon layer (8) is formed on a surface of a silicon substrate (1). Oxygen ions (2) are implanted into the silicon substrate through the polysilicon layer, and an SiO2 film (3) is formed in the silicon substrate at a position in a prescribed depth from the surface of silicon substrate. A heat treatment is performed to a silicon layer (4) between the polysilicon layer and the SiO2 film, thereby providing an SOI layer (5) with improved crystal quality. <IMAGE></p> |
申请公布号 |
EP0556795(A2) |
申请公布日期 |
1993.08.25 |
申请号 |
EP19930102468 |
申请日期 |
1993.02.17 |
申请人 |
MITSUBISHI DENKI KABUSHIKI KAISHA;MITSUBISHI MATERIALS CORPORATION |
发明人 |
NAKAI, TETSUYA;YAMAGUCHI, YASUO;NISHIMURA, TADASHI |
分类号 |
H01L21/20;H01L21/265;H01L21/322;H01L21/762;(IPC1-7):H01L21/76 |
主分类号 |
H01L21/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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