| 摘要 |
PURPOSE:To provide a machine having a monitor function by which measurement about the position of a converged beam and about the state of image formation of beam patterns is quickly performed comparatively simply and at low cost, and by which a machining surface is also simultaneously observed, in regard to the device used for machining by excimer laser. CONSTITUTION:In the excimer laser machine constituted mainly of an excimer oscillator 6, a projection optical system 4, 5, and a sample mounting stand 3; by providing a diverging mirror 8 for light in the visible region and a laser beam before the position of the machining surface and in the middle of an optical path in an optical system; by arranging a detecting element surface 1 of a two dimensional array CCD in the position that is different from the position of the machining surface and also optically equivalent; and in addition, by setting a CCD camera 7 for monitoring the machining surface in the position off the laser beam axis; the position of the converged beam on the machining surface or the image forming position of the pattern beam formed by a mask pattern projection method, that is, the energy density distribution of the laser beam is quickly measured, and simultaneously, the machining surface is observed at any time. |
