| 摘要 |
PURPOSE:To obtain sintered aluminum nitride having high strength, thermal conductivity and heat-radiation performance by heating a formed material composed of AlN powder and a grain boundary forming component under prescribed condition and solidifying the product by cooling at a prescribed cooling rate. CONSTITUTION:A sintered AlN having high strength and thermal conductivity and a grain boundary size and maximum pore diameter of <=1mum can be produced by adding 1-7.5wt.% of a grain boundary forming component (rare earth element and/or alkaline earth metal element) to AlN powder, forming and degreasing the obtained raw material mixture, sintering at 1700-2000 deg.C and solidifying the formed liquid phase formed from the grain boundary component by cooling the sintered compact at a cooling rate of <100 deg.C/h until the temperature is lowered to the freezing temperature of the liquid phase. |
