INSPECTING APPARATUS OF DEFECT OF REPEATED PATTERN,申请号JP19920325192-传众专利搜索

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发明名称	INSPECTING APPARATUS OF DEFECT OF REPEATED PATTERN
摘要
申请公布号	JPH05264465(A)	申请公布日期	1993.10.12
申请号	JP19920325192	申请日期	1992.12.04
申请人		发明人
分类号	G01N21/88;G01N21/956;G06T1/00;G06T7/00;H01L21/66;(IPC1-7):G01N21/88;G06F15/62	主分类号	G01N21/88
代理机构		代理人
主权项
地址

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