SURFACE TREATING DEVICE,申请号JP19920106385-传众专利搜索

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发明名称	SURFACE TREATING DEVICE
摘要
申请公布号	JPH05299363(A)	申请公布日期	1993.11.12
申请号	JP19920106385	申请日期	1992.04.24
申请人	TOSHIBA CORP	发明人	AOKI KATSUAKI
分类号	C23F4/00;H01L21/205;H01L21/302;H01L21/3065;(IPC1-7):H01L21/205	主分类号	C23F4/00
代理机构		代理人
主权项
地址

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