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发明名称
Process of manufacturing semiconductor devices
摘要
申请公布号
US5262258(A)
申请公布日期
1993.11.16
申请号
US19910714429
申请日期
1991.06.12
申请人
NEC CORPORATION
发明人
YANAGISAWA, MASAYUKI
分类号
H01L21/30;G03F7/20;H01L21/027;(IPC1-7):G03F9/00
主分类号
H01L21/30
代理机构
代理人
主权项
地址
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