| 摘要 |
PURPOSE:To eliminate unstableness in the visual evaluation of periodic patterns so as to stably execute unevenness inspections and quality control by performing surface integration on picture data exceeding a mean value obtained by performing filtering processes on the picture data. CONSTITUTION:This method is used for determinating the nonuniformity of the optical property of a periodic pattern formed by repetitively arranging a unit pattern. A DC power source 8 drives a lamp 7 which irradiates a sample 4 through a diffusing plate 6 and a CCD camera 1 picks up the image of the light transmitted through the sample 4. A picture processing device 2 performs filtering processes, such as a differentiation process, smoothing process, etc., on picture data. By the filtering processes, integration is performed on the picture data exceeding the mean value of the picture level at every picture element of an unevenness-emphasized picture. A standardized numerical value obtained by dividing the integrated result by the area of integration is used for indicating the degree of unevenness of the sample 4. Since the unevenness of various kinds of industrial products having periodic patterns can be determinated, the reliability and accuracy of the quality control and inspections of the products can be improved. |
