CONTROLLER FOR MOVING STAGE,申请号JP19920126245-传众专利搜索

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发明名称	CONTROLLER FOR MOVING STAGE
摘要
申请公布号	JPH05324084(A)	申请公布日期	1993.12.07
申请号	JP19920126245	申请日期	1992.05.19
申请人	OLYMPUS OPTICAL CO LTD	发明人	YUGAWA HIROSHI
分类号	G02B21/26;G05D3/12;(IPC1-7):G05D3/12	主分类号	G02B21/26
代理机构		代理人
主权项
地址

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