| 发明名称 |
Notch beveling on semiconductor wafer edges |
| 摘要 |
An apparatus and method of contouring the edge of a semiconductor wafer in a fiduciary mark notch utilizes a contouring wheel or burr having a smaller diameter than the diameter of the fiduciary mark notch.
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| 申请公布号 |
US5289661(A) |
申请公布日期 |
1994.03.01 |
| 申请号 |
US19920995447 |
申请日期 |
1992.12.23 |
| 申请人 |
TEXAS INSTRUMENTS INCORPORATED |
发明人 |
JONES, JOEL B.;DYER, LAWRENCE D. |
| 分类号 |
B24B9/06;(IPC1-7):B24B9/08 |
主分类号 |
B24B9/06 |
| 代理机构 |
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| 主权项 |
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| 地址 |
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