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发明名称
SPUTTERING APPARATUS
摘要
申请公布号
KR940001677(B1)
申请公布日期
1994.03.05
申请号
KR19890018307
申请日期
1989.12.11
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
TANAKA, KUNIO;OHNISHI, YOUICHI;YOKOYAMA, MASAHIDE
分类号
C23C14/00;C23C14/34;H01J37/32;H01J37/34;(IPC1-7):C23C14/34
主分类号
C23C14/00
代理机构
代理人
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地址
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