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经营范围
发明名称
ETCHING METHOD
摘要
申请公布号
JPH06104217(A)
申请公布日期
1994.04.15
申请号
JP19920249586
申请日期
1992.09.18
申请人
HITACHI LTD;HITACHI KASADO ENG KK
发明人
ROKUTAN TOYOHIRO;ABE TAKAHIRO;YAMAMOTO NAOHIRO
分类号
H01L21/302;H01L21/3065;(IPC1-7):H01L21/302
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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