Use of a disc laser for the crystallization of silicon layers

摘要

In the laser oscillator or laser amplifier, the laser exhibits a mode number (M2>) of 7 or more in one direction perpendicular to the radiation direction, and 7 or less in other orthogonal direction. The resonator in the laser oscillator is used for production of anamorphotic radiation. The laser oscillator exhibits cylinder optics, elliptical beam width in a non-linear optical crystal, resonator-external production of an anamorphotic beam in a laser amplifier, and an etalon with a spectral line width of greater than 0.1 Nm. Independent claims are included for: (a) disk laser with anamorphotic resonator for the production of radiation; and (b) disk laser system with an amplifier for resonator external production of laser beam.