ION SOURCE WITH REMOVABLE ANODE ASSEMBLY

摘要

An ion source (1500) has a removable anode assembly (1550) that is separable and from a base assembly (1552) to allow for ease of servicing the consumable components of the anode assembly (1500). Such consumables are easily removable and replaceable and may include a gas distributor (1510), a thermal control plate (1508), an anode (1512), and one or more thermal transfer sheets (1516, 1518, 1520) interposed between other components (1516, 1518, 1520). A pole piece (1514) and a cathode (1540) may also be part of the anode assembly (1550). The anode assembly (1550) may be attached to the base assembly (1552) via the pole piece (1514). The thermal control plate (1508) may have a port (1598) for passing working gas from one side of the thermal control plate (1508) to the other. An interface surface (1521) on the thermal control plate (1508) may have a pattern of recesses to allow the working gas to disperse underneath the gas distributor (1510). The gas distributor (1510) may be mounted to the thermal control plate (1508) in the anode assembly (1550) with several set screws (1542). The gas distributor (1510) may be disk shaped with counterbores (1548) in a surface to recess the nuts (1544) of the set screws (1542). Alternately, the gas distributor (1510) may be clamped or held in place by other structures or components of the ion source (1500). The thermal transfer sheets (1516, 1518, 1520) may be interposed between the consumable components within the anode assembly (1550). The thermal transfer sheets (1516, 1518, 1520) may be thermally conductive and either electrically insulating or conductive.