发明名称 STABILIZED, NON-AQUEOUS CLEANING COMPOSITIONS FOR MICROELECTRONICS SUBSTRATES
摘要 Non-aqueous stripping and cleaning compositions for cleaning microelectronics devices, the composition having a least one organic sulfur-containing polar compound as a stripping solvent, at least one water-free source of a strong hydroxide base, and at least one hydroxypyridine stabilizing agent to inhibit detrimental side reactions.
申请公布号 KR20080094920(A) 申请公布日期 2008.10.27
申请号 KR20087020083 申请日期 2007.01.31
申请人 MALLINCKRODT BAKER, INC. 发明人 KANE SEAN M.
分类号 C11D7/34;C11D7/32;G03F7/42 主分类号 C11D7/34
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