| 摘要 |
A nozzle assembly, an apparatus for supplying a processing liquid having the same, and a processing liquid supplying method using the same are provided to suppress contamination of non-selected nozzles when a processing solution is injected selectively onto a substrate through a selected nozzles. A plurality of process solution supply lines are installed in a housing(110). The process solution supply lines include a plurality of flow paths for transferring different kinds of process solutions. A plurality of injection nozzles(130) are connected to the process solution supply lines and has a rotatable function. When the injection nozzles are rotated and a part of the injection nozzles is selectively directed to the substrate, the injection nozzles are extended from one end of the housing to separate the residual injection nozzles from a substrate.
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