| 摘要 |
A ventilation valve of a processing chamber is provided to prevent water leakage of a pipe line and check an intermittent state of the pipe line with the naked eye by checking the opened and closed state of a flanger, using an indicator. A ventilation valve(100) of a processing chamber comprises a valve body(120), a rotary actuator(116), a controller(112), an operation part body(110), and a heater(140). A flanger(122) is inserted in the valve body. The rotary actuator is shafted with the flanger. The controller adjusts a rotary direction of the rotary actuator. The rotary actuator and the controller are inserted in the operation part body. The heater surrounds and heats an outer peripheral surface of the valve body. The rotary actuator restricts the valve body by the flanger. A coupling(118) is formed at a shaft combining the rotary actuator with the flanger. A sensor(130) is formed at an outer periphery of the valve body to sense gas temperature. The operation part body includes an indicator for checking the opened and closed state of the flanger.
|
