| 摘要 |
PROBLEM TO BE SOLVED: To provide a process management system that can quickly analyze information acquired by an apparatus. SOLUTION: The process management system has a first acquisition means (control and monitoring part 20) for acquiring state information representing the state of each part of a vacuum process apparatus 1, a second acquisition means (control and monitoring part 20) for acquiring control information on the control of the vacuum process apparatus, an association means (timer 34) for associating the state information and control information acquired by the first and second acquisition means, a storage means (log storage device 2) for storing the state information and control information associated by the association means, an analysis means (analysis apparatus 4) for analyzing the state information by referring to the control information, and a presentation means (analysis apparatus 4) for presenting the information resulting from the analysis by the analysis means. COPYRIGHT: (C)2009,JPO&INPIT |
