| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface treatment method by double row substrate vertical carriage, a double row chuck hanger used for this surface treatment method, and a double row chuck opening and closing device of this double row chuck hanger. SOLUTION: A method to surface-treat a plurality of substrates W hung in a parallel state by the double row chuck hanger 1 while carrying them in treatment chemical liquid along a rail 2 is constituted. The double row chuck opening and closing device 20 having chuck opening and closing working parts 21A, 21B, 21C capable of individually actuating a plurality of rows of opening and closing chucks 3A, 3B, 3C of this double row chuck hanger 1 with the opening and closing chucks of each of the rows against energizing force of a spring by a driving part independent in a pressurized open state is constituted by providing the double row chuck hanger 1 having the double row chuck 5 constituted of a plurality of rows of the opening and closing chucks 3A, 3B, 3C capable of hanging a plurality of the substrates W in the parallel state. COPYRIGHT: (C)2009,JPO&INPIT |
